Meeting NJ Low Level TO-15 Air Testing Method Requirements

Author: Jason Herrington

Published By: Restek Corporation

Year of Publication: 2017

Link: http://www.restek.com/Technical-Resources/Technical-Library/Air-Sampling/env_EVAN2708-UNV

Abstract:

The NJ low level TO-15 air testing method is based on U.S. EPA Method TO-15, but it has more some differences that make it quite challenging. The broader calibration range (0.2–40 ppbv) is particularly difficult to meet. In this application note, we focus on the method’s analytical requirements and demonstrate how to meet them using a Markes Unity with CIA Advantage and a 30 m Rtx-VMS column.

Add the Performance of Restek’s RAVE Valves to Your Entech Air Cans

Restek Air Valve Excellence (RAVE) is now available for the easy retrofit of 3.2 L, 6 L, and 15 L Entech air sampling canisters. These new RAVEn valves have an identical internal design to the incredibly popular and rugged RAVE valves recently released on Restek’s SilcoCan, TO-Can, and miniature air sampling canisters. Upgrade from your TOV and TOV-2 valves—with no modification needed!

Order today at www.restek.com/air

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About RAVE Valves

Restek Air Valve Excellence (RAVE) brings proven long life, leak-free performance, and effortless operation to your air sampling canisters. This durable design has been engineered to exceed 15,000 cycles—and every valve is leak-tested with helium to 1×10-6 mL/sec before it leaves our facility. The W-type valve seats are work-hardened to enhance damage resistance, while the wetted surfaces contain no moving parts. And because convenient, reliable field use isn’t just about withstanding the rigors of harsh environments, the RAVE valve achieves full closure with a quick twist of the fingers (only 10 in-lb) and is easy to access, even for big hands or when wearing bulky gloves.

Standard on Restek’s full line of SilcoCan, TO-Can, and miniature air sampling canisters, these American-made valves are also ideal for upgrading existing canisters. Rugged stainless steel RAVE valves can be ordered with Siltek treatment for added inertness and either 2 or 3 ports to accommodate an optional gauge. Plus, diaphragm rebuild kits are available to further extend the life of these long-lasting air valves. Turn to your trusted partner for air sampling and chromatography—order Restek Air Valve Excellence for your air sampling canisters today.

Optimize Analysis of Polar and Coeluting VOCs in Whole Air Canister Samples Using an Rtx®-VMS GC Column

Author(s): Jason S. Herrington, Ph.D.
Restek Corporation

Published By: Restek Corporation

Year of Publication: 2016

Link: http://www.restek.com/Technical-Resources/Technical-Library/Air-Sampling/env_EVAR2388-UNV

Abstract: Since Method TO-15 is a performance-based method for analyzing VOCs in whole air canister samples, labs have the option to use any GC column that meets performance criteria. Shorter columns can be used to reduce analysis times and stationary phases that separate difficult coelutions can be selected. After evaluation of a wide variety of columns, the Rtx®-VMS column offers the best overall performance and is particularly recommended when polar or coeluting compounds are included in the list of target analytes.

Whole Air Canister Sampling and Preconcentration GC-MS Analysis for pptv Levels of Trimethylsilanol in Semiconductor Cleanroom Air

Author(s): Jason S. Herrington
Restek Corporation

Published By: Restek Corporation

Year of Publication: 2013

Link: http://www.restek.com/Technical-Resources/Technical-Library/Air-Sampling/env_EVAN1788-UNV

Abstract: The costly damage trimethylsilanol (TMS) in cleanrooms exacts on scanner lenses in the semiconductor industry has resulted in the demand for accurate and reliable methods for measuring TMS at trace levels (i.e., parts-per-trillion, volume-per-volume of air [pptv] [~ng/m3]. This study developed a whole air canister-based approach for field sampling trimethylsilanol in air, as well as a preconcentration gas chromatography–mass spectrometry (GC-MS) laboratory method for analysis. Results demonstrate clean canister blanks (0.06 pptv [0.24 ng/m3], which is below detection limit [BDL]); excellent linearity (a calibration relative response factor [RRF] relative standard deviation [RSD] of 9.8%) over a wide dynamic mass range (1.0 to 100 pptv); recovery/accuracy of 93%; a low selected ion monitoring (SIM) method detection limit (MDL) of 0.12 pptv (0.48 ng/m3); replicate precision of 6.8% RSD; and stability (84% recovery) out to four days of storage at room temperature. These performance levels should meet the demands of the semiconductor industry for monitoring trace levels of trimethylsilanol in cleanrooms.